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In 첨가양에 따른 IZO 박막의 미세구조 특성연구
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 장보라 | - |
| dc.date.accessioned | 2017-02-22T02:22:37Z | - |
| dc.date.available | 2017-02-22T02:22:37Z | - |
| dc.date.issued | 2011 | - |
| dc.date.submitted | 2011-01-28 | - |
| dc.identifier.uri | http://kmou.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000002174302 | ko_KR |
| dc.identifier.uri | http://repository.kmou.ac.kr/handle/2014.oak/8299 | - |
| dc.description.abstract | We investigated changes in the preferred orientation and microstructure of IZO films with increasing In content. ZnO film and IZO films with In contents in the range of 0.3~50 at.% were deposited on Si (111) substrates by pulsed laser deposition and were subsequently characterized by X-ray diffraction (XRD), atomic force microscopy (AFM), and transmission electron microscope (TEM). Structural analysis of the films revealed that with increasing In content, the preferred orientation of films changed from (001) to random for an In content of 10 at.% and finally became (100) for an In content of 20 at.%. The grain size of columns and RMS values showed a gradual decrease with increasing In content. By introducing an In content of up to 10 at.%, the initial orientation of nuclei changed from c-axis to random | - |
| dc.description.abstract | nuclei with a preferred a-axis are dominant for an In content of 20 at.%, reflecting a deterioration of the tetrahedral coordination of ZnO. Consequently, the growth direction of grains changed and the preferred orientation of grains affected the microstructure | - |
| dc.description.tableofcontents | 1. 서 론 1 2. 이론적 배경 4 2.1 ZnO 기본 물성 4 2.1.1 ZnO 결정 구조 4 2.1.2 ZnO 전기적 특성 8 2.1.3 ZnO 첨가 효과 12 2.2 우선방위성 메커니즘 14 2.3 PLD (Pulsed Laser Deposition)법 17 2.3.1 레이저 빔과 타겟의 상호 작용 19 2.3.2 방출된 물질과 레이저 빔의 상호작용 21 2.3.3 플라즈마의 비등방형 단열 팽창 22 2.3.4 박막성장 23 3. 실험 방법 28 3.1 IZO 타겟 제작 28 3.2 PLD 실험 장치 31 3.3 PLD 법을 이용한 ZnO, IZO 박막 증착 33 3.3.1 Si (111) 기판 위에서 성장 33 3.3.2 Glass 기판 위에서 성장 35 3.4 ZnO, IZO박막의 특성분석 36 4. 결과 및 고찰 37 4.1 EDS 측정 결과 37 4.2 XRD 측정 결과 39 4.3 AFM 측정 결과 45 4.4 TEM 측정 결과 49 5. 결론 56 참고문헌 58 | - |
| dc.language | kor | - |
| dc.publisher | 한국해양대학교 | - |
| dc.title | In 첨가양에 따른 IZO 박막의 미세구조 특성연구 | - |
| dc.title.alternative | A study on the microstructural property of IZO films with In contents | - |
| dc.type | Thesis | - |
| dc.date.awarded | 2011-02 | - |
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