In this study, a short-wavelength transmission line employing periodically arrayed capacitive devices (PACD) was studied for application to miniaturized on-chip passive component on monolithic microwave integrated circuit (MMIC). According to the results, the microstrip line employing PACD showed shorter wavelength and lower characteristic impedance than conventional one. The wavelength microstrip line employing PACD structure was 8% of the conventional one on GaAs substrate. Using the theoretical analysis, basic characteristic of the transmission line employing PACD (e.g., loss, effective dielectric constant, effective propagation constant, bandwidth ) were also investigated in order to evaluate its suitability for application to a development of miniaturized passive on-chip components on MMIC. In addition, for application to the design of RF passive components, the equivalent circuit of the PACD structure should be extracted. And for the theoretical analysis, parasitic components of PACD’s equivalent circuit were used closed-form equations. Above results indicate that the microstrip line employing PACD is a promising candidate for a development of miniaturized passive components on MMIC.