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PVD법을 이용하여 증착한 TiN 박막의 형성 및 내식특성의 분석
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이수빈 | - |
| dc.date.accessioned | 2017-02-22T02:26:49Z | - |
| dc.date.available | 2017-02-22T02:26:49Z | - |
| dc.date.issued | 2016 | - |
| dc.date.submitted | 2016-03-12 | - |
| dc.identifier.uri | http://kmou.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000002232575 | ko_KR |
| dc.identifier.uri | http://repository.kmou.ac.kr/handle/2014.oak/8421 | - |
| dc.description.abstract | Recently, the lifetime extension of nuclear power plant is rearing so it is necessary to have facility safety management and economical management. However, when bolts in nuclear power plant are replaced and turbine overhauls for nuclear power plant are disassembled, there are lot of problems due to an occurrence of stuck bolt in clamping part. In order to solve these problems, first, hybrid vacuum chamber was designed and manufactured which can deposit Arc ion plating and Sputtering. So with the method of Arc ion plating and Sputtering, we used the machine to deposit TiN on A913 B7 bolt. The compositions and characteristics of the bolt which are XRD and SEM and the mechanical properties of tensile strength, yield strength and elongation were analyzed and through corrosion rate test, neutral salt spray test, block test and irradiation exposure test, it was tested how long the bolt can endure various conditions in nuclear power plant. In the result of observation of SEM and XRD, the continual and even coating layer was clearly seen. In the test of corrosion characteristics of a boric acid solution, TiN coating bolt showed the least corrosion rate and had the least external transition. Characteristics of the base material were not changed due to the coating deposition. The coating deposition does not interfere with the base material characteristics. Through the neutral salt spray test, the TiN bolt was able to endure in brine for 200 hours. Through Irradiation exposure test, the specimen's test result was confirmed that the mechanical properties are preserved comparing to radiation gamma irradiation before. When this TiN coating bolt are used to a nuclear power plant, lifetime can be extended compared to conventional bolt, but it needs to be checked what kind of properties are required additionally. | - |
| dc.description.tableofcontents | 1. 서 론 1 2. 이론적 배경 6 2.1 증착공정 6 2.1.1 박막의 정의 6 2.1.2 표면처리기술의 발달 및 분류 6 2.1.3 물리적 증기증착(Physical vapour deposition)공정 8 2.2 증착공정에 이용되는 플라즈마 10 2.3 이온 플레이팅 공정 13 2.3.1 이온 플레이팅 공정의 원리 13 2.3.2 이온 플레이팅의 특징 15 2.3.3 이온 플레이팅의 종류 15 2.4 스퍼터링 공정 16 2.4.1 스퍼터링 공정의 원리 16 2.5 TiN의 물리적·기계적 성질 20 3. 실험장비 제작 및 실험방법 23 3.1 실험목표 및 범위 23 3.1.1 시험편 제작 목적 23 3.1.2 시험편 제작 24 3.2 실험장비 제작 27 3.2.1 코팅 증착장비 개요 27 3.2.2 코팅 증착장비 설계 27 3.2.3 진공펌프 30 3.2.4 증착방법 31 3.3 분석방법 33 3.3.1 SEM, XRD 측정 33 3.3.2 내방사선 테스트 33 3.3.3 기계적 특성 테스트 33 3.3.4 붕산수 부식특성 테스트 33 3.3.4.1 붕산수 부식특성 평가방법 34 3.3.5 염수분무 테스트 35 4. 실험결과 및 분석 36 4.1 모재의 특성 분석 36 4.1.1 시험편 제작 및 기계적 특성 36 4.1.2 시험편의 화학성분 분석 44 4.2 TiN 박막의 표면 모폴로지 관찰 46 4.2.1 Ti 박막의 SEM image 분석 46 4.2.2 TiN 박막의 SEM image 분석 48 4.2.3 Ti/TiN 박막의 SEM image 분석 50 4.3 TiN 박막의 결정배향성 관찰 52 4.3.1 TiN 박막의 XRD pattern 분석 52 4.3.2 Ti/TiN 박막의 XRD pattern 분석 58 4.4 내방사선 결과 고찰 60 4.5 기계적 특성 분석 63 4.6 내식특성 분석 65 4.6.1 붕산수에 따른 부식성 65 4.6.2 염수분무에 따른 부식성 70 5. 결 론 75 참고문헌 77 | - |
| dc.language | kor | - |
| dc.publisher | 한국해양대학교 대학원 조선기자재공학과 | - |
| dc.title | PVD법을 이용하여 증착한 TiN 박막의 형성 및 내식특성의 분석 | - |
| dc.type | Thesis | - |
| dc.date.awarded | 2016-02 | - |
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