한국해양대학교

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최적 경로선정 알고리즘 기반의 300mm WAFER 이송용 OVERHEAD HOIST TRANSPORT 최적 제어관리에 관한 연구

Title
최적 경로선정 알고리즘 기반의 300mm WAFER 이송용 OVERHEAD HOIST TRANSPORT 최적 제어관리에 관한 연구
Alternative Title
A Study on the Development of the Overhead Hoist Transport Control and Management for 3mm Wafer Transfer Based on the Optimal Flow Path Algorithm
Author(s)
김학선
Publication Year
2004
Publisher
한국해양대학교 대학원
URI
http://kmou.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000002175975
http://repository.kmou.ac.kr/handle/2014.oak/10310
Abstract
This paper explain Overhead Hoist Transport, Overhead Hoist Transport Control System and OPC(One-board Programmable Controller). Overhead Hoist Transport is the device that transfer wafer though rail installed on the ceiling. OHT Control System is the system that integrate and control to the best optimal and manage the many OHT. It is used in the factory that produced semiconductor wafer.

OHT is operated from an upper group by the transport order to be ordered.

Consequently, this paper is designed the module that consist is command entity and operate entity. And Wireless LAN communication and protocol is designed. It is ensured against risks which the minimize could communication error and fail.

The experiment observe SEMI Standsed scenario made the OHT for research and was the low to the experiment method to be produced. Therefore, OPC that is made by the design verified the adequacy of a system design.

In this paper, All final result developed so that the contentment could order various driving condition and characteristic that contain a semicoductor standard.
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기관시스템공학과 > Thesis
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000002175975.pdf Download

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