최적 경로선정 알고리즘 기반의 300mm WAFER 이송용 OVERHEAD HOIST TRANSPORT 최적 제어관리에 관한 연구

Abstract

This paper explain Overhead Hoist Transport, Overhead Hoist Transport Control System and OPC(One-board Programmable Controller). Overhead Hoist Transport is the device that transfer wafer though rail installed on the ceiling. OHT Control System is the system that integrate and control to the best optimal and manage the many OHT. It is used in the factory that produced semiconductor wafer.

OHT is operated from an upper group by the transport order to be ordered.

Consequently, this paper is designed the module that consist is command entity and operate entity. And Wireless LAN communication and protocol is designed. It is ensured against risks which the minimize could communication error and fail.

The experiment observe SEMI Standsed scenario made the OHT for research and was the low to the experiment method to be produced. Therefore, OPC that is made by the design verified the adequacy of a system design.

In this paper, All final result developed so that the contentment could order various driving condition and characteristic that contain a semicoductor standard.