한국해양대학교

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Si (111) 기판 위에 증착된 ZnO 박막의 열처리 효과에 따른 구조적, 광학적 특성 연구

Title
Si (111) 기판 위에 증착된 ZnO 박막의 열처리 효과에 따른 구조적, 광학적 특성 연구
Alternative Title
The structural and optical properties of thermal annealed ZnO films deposited on Si (111) substrates
Author(s)
이주영
Publication Year
2005
Publisher
한국해양대학교 대학원
URI
http://kmou.dcollection.net/jsp/common/DcLoOrgPer.jsp?sItemId=000002174428
http://repository.kmou.ac.kr/handle/2014.oak/8450
Abstract
Zinc oxide films were deposited on Si (111) substrates by radio-frequency (rf) sputtering at a room temperature and annealed in H2O, air, N2 ambient at temperatures between 700, 800 and 900 oC for 2 hrs. The effects of thermal annealing on the structural and optical properties of ZnO films were investigated by atomic force microscope (AFM), X-ray diffraction (XRD), photoluminescence (PL), Auger and transmission electron microscopy (TEM).
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응용과학과 > Thesis
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